JPH0334059U - - Google Patents
Info
- Publication number
- JPH0334059U JPH0334059U JP9383789U JP9383789U JPH0334059U JP H0334059 U JPH0334059 U JP H0334059U JP 9383789 U JP9383789 U JP 9383789U JP 9383789 U JP9383789 U JP 9383789U JP H0334059 U JPH0334059 U JP H0334059U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- evaporation
- plating device
- evaporation source
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000007733 ion plating Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9383789U JPH0334059U (en]) | 1989-08-11 | 1989-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9383789U JPH0334059U (en]) | 1989-08-11 | 1989-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0334059U true JPH0334059U (en]) | 1991-04-03 |
Family
ID=31643198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9383789U Pending JPH0334059U (en]) | 1989-08-11 | 1989-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334059U (en]) |
-
1989
- 1989-08-11 JP JP9383789U patent/JPH0334059U/ja active Pending
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